Werkwijze voor het regenereren van cryocondensatiepomppanelen in een vacuümkamer, vacuümkamer geschikt voor het uitvoeren van de werkwijze en een inrichting voor het coaten van produkten voorzien van een dergelijke vacuümkamer.

摘要

A method of regenerating cryocondensation pump panels disposed in a vacuum chamber, which cryocondensation pump panels, before being heated for the regeneration, are screened from the vacuum chamber by screening panels, a reduced pressure relative to the vacuum chamber being created in the screened space in which the cryocondensation pump panels are situated, and a non-condensing gas being carried into the vacuum chamber so that non-condensing gas flows from the vacuum chamber via narrow gaps between the screening panels relative to each other and/or the vacuum chamber walls into the screened space. The invention also relates to a vacuum chamber provided with screening panels for carrying out the method and to an apparatus provided with such a vacuum chamber.