LOW PRESSURE APPARATUS FOR TREATING VOLATILE NOXIOUS COMPOUND

摘要

PURPOSE: To make it possible to save detoxication of pump oil by arranging a pyrolysis and precipitation apparatus for volatile and toxic compds. just before a holding pump and providing a cracking apparatus with an exchangeable pack of a packing material. CONSTITUTION: The volatile and toxic compds., such as B2 H6 , PH3 and AsH3 , come into contact with the pack of such packing material as special steel scrap, where the compds. are heated to 300 to 900 deg.C and the pyrolysis and precipitation of the volatile and toxic compds. are executed. The gases are thereafter sent to the holding pump. The pack of the packing material is exchangeable and the used pack is replaced with a fresh pack. The need for executing the detoxication of the pump oil is thus eliminated.