METHOD AND APPARATUS FOR ANALYZING SURFACE

摘要

PURPOSE: To realize the surface analyzing method and the analyzing device thereof, which measure the distribution of the atoms of light elements such as hydrogen present in the neighborhood layer of the surface of the sample efficiently in a short time with high accuracy. CONSTITUTION: A sample-irradiation-ion beam 2 in a region of several 100keV is cast on the surface of a sample 1. The energy of light-element ions 3 recoiled by the sample-irradiation ions 2 is analyzed by an electrostatic energy analyzer 6. Only the light element to be detected among the ions passed through the analyzer 6 is transmitted through a very thin filter 7. The element is detected by a position-sensitive-type detector 8, and the distribution of the presence of the atoms of the light element in the sample is obtained highly accurately.