| 摘要 |
<p>PURPOSE: To freeze and fix a wafer in a sucked state by supplying water and without being frozen by a method wherein a suction part which socks and holds the wafer and a refrigeration part which refrigerates and fixes the wafer held by the suction part are installed at a chuck table. CONSTITUTION: A chuck table T4 is constituted of a lower-part table 31 and of an upper-part table 41 which is formed at the lower-part table 31 so as to be detachable. A suction part 32 which is composed of a plurality of holes is formed on the bottom face of a fitting part 31a by which the lower-part table 31 attaches and removes the upper-part table 41. In addition, a suction part 42 which is composed of many small holes in a surface plate 41a is formed in the upper-part table 41, and refrigeration parts 43 which are composed of thermionic elements such as Peltier elements or the like are arranged and installed on the rear of a surface plate 41a so as not to close the suction part 42. In addition, a coupling hole 41b which is made to communicate with a through hole 31b in the center of the lower-part table 31 is formed in the central part of a bottom plate.</p> |
