| 摘要 |
<p>PURPOSE: To equalize the width of a resistance wiring when the resistance wiring equivalent to plural series resistors is placed on a semiconductor integrated circuit chip in a ladder shape. CONSTITUTION: When a resistance wiring 8 of a fixed length that is equivalent to plural series resistors constructing a sequential comparison type A/D converter is folded in a ladder shape, the spaces secured between the parts of the wiring 8 opposite to each other are set equal to each other. At the same time, the dummy wirings 10 and 11 of the same material as the wiring 8 are placed at the positions outside both end parts of the folded wiring 8 with a space equal to those of the wiring 8 secured between both wirings 10 and 11. In such a constitution, the equal width is secured for the wiring 8 despite application of the etching processing and therefore an accurate result of A/D conversion is obtained.</p> |
