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发明名称
TREATMENT OF LAMINATED FILMS
摘要
申请公布号
JPH08222544(A)
申请公布日期
1996.08.30
申请号
JP19950023593
申请日期
1995.02.13
申请人
SONY CORP
发明人
KIYOTA HISAHARU
分类号
C23C16/02;C23F4/00;H01L21/203;H01L21/205;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23C16/02
代理机构
代理人
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地址
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