发明名称 MANUFACTURE OF IMAGE DISPLAY ELMENT SUBSTRATE AND ITS DEVICE
摘要 PURPOSE: To provide a manufacturing method and its device of an image display element substrate in which a liquid is not contacted to at least a picture element area formed on the main surface on the subsrate and a wiring cutting with no attachment of scattering matters near the wiring cutting part is realized. CONSTITUTION: The surface where the pattern of an image display element substrate 1 is formed is faced upward, and the substrate 1 is fixed to a sample board 7, and a laser beam 14 is focused and radiated on a wiring cutting to cut in the condition to cover on a wiring 3 to cut and near the position locally with a liquid 11, other than at least the picture element area 2 of the substrate 1. In order to prevent the leaking of the liquid 11 to the picture element area 2, a rubber form seal member 8 is provided between an opposing plane 9 and the substrate 1. As the liquid 11, a material not to deteriorate the substrate and the wiring circuit is used, and it is fed from a liquid lead-in port 12 and exhausted from an exhaust port 15. It is preferable to make the liquid circulate and be fluid in the laser radiating condition. By such a way, the process can be carried out by leaving no spot (water mark) at least on the picture element area 2 of the substrate 1.
申请公布号 JPH08220559(A) 申请公布日期 1996.08.30
申请号 JP19950022543 申请日期 1995.02.10
申请人 HITACHI LTD 发明人 SAKAMOTO HARUHISA;MIYAUCHI TAKEOKI;HONGO MIKIO;MARUYAMA SHIGENOBU;MATSUZAKI HIDEO;MIYATA KAZUFUMI
分类号 G02F1/136;B23K26/00;B23K26/12;B23K26/38;G02F1/13;G02F1/1333;G02F1/1368 主分类号 G02F1/136
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