| 摘要 |
PURPOSE: To output a high power laser light, and enable automatic focal point adjustment of high precision, by installing a laser light source for generating a laser light whose wavelength is different from that of a laser light for distance detection, and a dichroic mirror. CONSTITUTION: Laser light fluxes from high power laser light sources 10-1, 10-2 are transmitted and a target 16 is irradiated with the fluxes, via a movable objective 14. A dichroic mirror 28 receives a laser light for distance detection from an astigmatism distance detector 18, from the direction different by 90 deg., and reflects the light having the wavelength of the laser light for distance detection. The laser light for distance detection which has a specific wavelength is reflected by the dichroic mirror 28, and projected on the target 16 via the moval lens 14. The reflected light is made to return the dichroic mirror 28. Thereby the generation of high power laser light and the control of an automatic focal point can be made compatible with each other. |
