| 摘要 |
PURPOSE: To provide the X-ray fluorescence analyzer, which can improve the intensity of exciting X rays and the measuring accuracy, by suppressing the deterioration of the X-ray intensity caused by the generation of X-ray monochrome as much as possible. CONSTITUTION: An X-ray fluorescence analyzer 1 is constituted of an X-ray generator 10, a spectral crystal 13, which generates the monochrome from the X rays generated in the X-ray generator 10, an X-ray detector 20 for detecting fluorescent X rays 5, which are generated from a sample 2 by casting X-ray fluxes on the sample 2, a preamplifier 21, a proportional amplifier 22, a pulse height analyzer 23, a data processor 24 and the like. The crystal surface of the spectral crystal 13 is curved in the shape of the cured surface. The spectral crystal 13, an X-ray focal point A of the X-ray generator 10 and an irradiated position B of the sample 2 are arranged on the circumference of a Rowland circle RC with a radius R, respectively. |
