| 摘要 |
PURPOSE: To realize an economic apparatus in which the regulation of a conveyor is simplified, reliability is enhanced, and the installation of a detecting mechanism is reduced to the minimum limit. CONSTITUTION: A plurality of cassette placing bases 2-1, 2-2 are installed. At the time of operating, one cassette placing base is moved to a specific position 4, and the movement of a containing cassette of a material to be treated by a conveyor 3 to a treating chamber is conducted between the containing cassette of the position 4 and the chamber to treat it. Further, a detecting mechanism 6 in the cassette is installed near the contained cassette of the position 4. Accordingly, even if a plurality of the bases for placing the cassettes are installed, since the conveyor and the conveying position of the material to be treated at the base are at the same positions, the regulating position of the conveyor and the conveying position to the base can be set to one to be easily regulated. |
