| 摘要 |
<p>PURPOSE: To increase the kind of a pattern for process monitoring without increasing a chip area by a method wherein circuit patterns are formed differently by using an identical master plate. CONSTITUTION: Patterns, for process monitoring, which are selected arbitrarily from two kinds of patterns 7A, 7B which have been prepared in advance are formed in scribing regions 3 formed around a plurality of circuit elements 2A to 2I which are formed on a silicon single-crystal substrate 1. Thereby, since circuit patterns can be formed differently by using an identical master plate, kinds of patterns for process monitoring can be increased without increasing a chip area. As a result, the number of process monitoring items can be increased.</p> |
