| 摘要 |
PURPOSE: To provide a method for automatically teaching a wafer automatic transferring machine in which the teaching operation by an operator can be automated. CONSTITUTION: A method for transferring a wafer 3 by a wafer automatic transferring machine 4 between a cassette 1 and a boat 2 comprises the steps of detecting the positions of the cassette 1 and a reference wafer 3A placed in the boat 2 by sensors 5 and 7, measuring the coordinates of the wafer 3A and tweezers 6 for holding and transferring the wafer 3A from data output from an encoder at the timing of ON and OFF, and automatically correcting the shifting amount from the previous data, thereby automatically teaching. |
