| 摘要 |
PURPOSE: To improve the vertical movement stop accuracy of a loader and an unloader, and to prevent the conveying trouble and dust generation on a semiconductor substrate by providing a pitch reference line matching the height of a supporting groove for supporting a semiconductor substrate at a cassette jig, detecting it by detecting means and stopping an elevation base. CONSTITUTION: The semiconductor substrate processor comprises a loader 10 having a processing chamber, an elevation base 12 for placing a cassette jig 17 for containing a plurality of semiconductor substrates 21 in parallel with each other, and an elevating mechanism or an unloader. Further, the processor comprises a semiconductor substrate conveying jig 15 for delivering the substrate 21 to be processed from the jig 17 or containing the processed substrate 21 in the jig 17. In such a processor, the jig 17 has a pitch reference line 19 matching the height of a supporting groove for supporting the substrate 21. The detecting means 16 connected to the mechanism detects the line 19 to stop the rising or falling base 12. |
