MANUFACTURE OF SELF-ALIGNED OPTICAL FIBER-OPTICAL ELEMENT COUPLING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a self-arranging type optical fiber- optical element coupler by which the occurrence of an arranging error in a V groove and a solder bump can be prevented and the optical coupling efficiency of an optical element and optical fiber can be improved. SOLUTION: This manufacturing method is provided with a process of forming a first insulating film 13 and a pair of metallic pads 15 on a surface of a silicon substrate 11, a process of forming a second insulating film 17 on the first insulating film 13 and the metallic pads 15, a process of forming a photosensitive film 19 so that second opening parts 23 are formed in parts corresponding to the respective metallic pads 15 and a first opening part 21 is formed in an intermediate position of the two second opening parts 23, a process of exposing the silicon substrate 11 and the metallic pads 15 by removing the first and the second insulating films 13 and 17 by using the photosensitive film 19 as a mask, a process of forming a V groove 27 in an exposed part of the silicon substrate 11 by using the first and the second insulating films 13 and 17 as a corrosively carving mask after the photosensitive film 19 is removed and a process of forming a solder bump on the metallic pads 15.