SEMICONDUCTOR MANUFACTURING APPARATUS, GRINDING APPARATUS AND MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19950046680-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING APPARATUS, GRINDING APPARATUS AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH08222536(A)	申请公布日期	1996.08.30
申请号	JP19950046680	申请日期	1995.02.13
申请人	TOSHIBA CORP	发明人	TAKU SHINYA;KAWAI KAORU
分类号	B24B1/00;H01L21/304;(IPC1-7):H01L21/304	主分类号	B24B1/00
代理机构		代理人
主权项
地址

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