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发明名称
APPARATUS FOR MEASURING FILM THICKNESS
摘要
申请公布号
JPH08219729(A)
申请公布日期
1996.08.30
申请号
JP19950024936
申请日期
1995.02.14
申请人
JEOL LTD
发明人
KOSHIKAWA KOICHI;MIYAO KEIICHI
分类号
G01B11/06;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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