| 摘要 |
PURPOSE: To specify the kind and origin of a foreign matter contained in a sample without requiring any high discriminating technique. CONSTITUTION: The information about the kinds and origins of known substances existing in a device manufacturing atmosphere is stored in a characteristic information index section 2 and the characteristic X-ray spectrum analysis data of the known substances are stored in an EPMA(electron probe microanalyzer) data storing section 3. In addition, the IR (infrared absorption) spectrum analysis data of the known substances are stored in an IR data storing section 4 and the microscopic data of the known substances are stored in a microscopic data storing section 5. Moreover, the SEM(scanning electron microscopic) data of the known substances are stored in a SEM data storing section 6. When prescribed information about the physical properties of a foreign matter produced in the device manufacturing process obtained by analyzing the foreign matter is inputted from an input section 7, an arithmetic section 9 performs prescribed operation and outputs the information about the kind and origin of the foreign matter from an output section 10. |
