| 摘要 |
PURPOSE: To accurately measure an intricate three-dimensional shape of a plane to be measured by determining a function conformable to the shape information of an area connected through an overlapping part with an arbitrary partial area thereby determining the coordinate conversion of three-dimensional translation using a specified equation. CONSTITUTION: A division control section 5 grasps the rough shape of an object 2 to be measured through a rough shape measuring unit 1 and sets such division conditions as each partial area is confined within the length, depth and inclination measurable through a probe 3A. The partial area to be divided is then measured by means of a precise measuring unit 3 and a relative position attitude conversion stage 4 and the measurements are delivered to a calculating section 6. The calculating section 6 determines a function z=B (x, y, z) conformable to the shape information of an area being connected through an overlapping part with an arbitrary partial area. For k1 three-dimensional coordinate data (xi, yi, zi) (i=1, 2,..., k1), a rotation in the three-dimensional space described by more than three variables and a three- dimensional translation are applied to the function to obtain a function z=C (x, y). Finally, the coordinate conversion of the rotation and three-dimensional translation is determined such that the function z=C (x, y) provides a minimum value of expressionχ0<2> =Σzi-C (xi, yi)}<2> .
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