发明名称 VAPORIZER AND LIQUID DELIVERY SYSTEM USING SAME
摘要 A liquid vaporizer (100) includes a stack of coaxially aligned, thermally conductive, thin, flat disks (120) having different diameters. The larger diameter disks (140) each include at least one aperture and preferably a plurality of closely spaced apertures (146) radially located a predetermined distance from the center of the disk (140). The vaporizer (100) further includes means (170) for establishing a liquid film on at least a portion of the surfaces of the larger diameter disks (140) and for accelerating the vaporization of the liquid thereon by passing a gas through the apertures (146) of the larger diameter disks (140) over the liquid film on the portion of the surfaces of the larger diameter disks (140).
申请公布号 CA2210115(A1) 申请公布日期 1996.08.29
申请号 CA19962210115 申请日期 1996.02.13
申请人 MKS INSTRUMENTS, INC. 发明人 EWING, JAMES H.
分类号 B01D1/00;B01D1/22;B01D3/34;B01J4/00;B01J7/02;F24J3/00;(IPC1-7):B01D1/00 主分类号 B01D1/00
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