摘要 |
A module (7) for measuring the focus of a microscope objective (4) consists of a carrier (8, 9, 10) placed vertically on the object table (6) of the microscope holding a piezoelectric tubular scanner (12) for the fine positioning in three directions of an optical near-field probe comprising a fibreglass tube (13) with a point aperture of less than 200 nm (13a) and a photodiode light-detector (14) at the other end. Two light emitting diodes (17a, 17b) illuminate the probe and two distance sensors (18a, 18b) determine its position. For measuring the intensity of a laser beam focussed through the objective, the glass-fibre probe is moved in three directions and detects the light picked up through the fibre in each position. A similar process can be used for measuring the detection volume or for measuring picture transmission capacity.
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申请人 |
FA. CARL ZEISS, 89518 HEIDENHEIM, DE |
发明人 |
VOELCKER, MARTIN, DR., 89551 KOENIGSBRONN-ZANG, DE;WOERMANN, WOLFGANG, 85302 GEROLSBACH, DE;GRUB, ROBERT, DR., 73560 BOEBINGEN, DE;GLUCH, MARTIN, DR., 07743 JENA, DE |