发明名称 Method for forming crystal and crystal article obtained by said method
摘要 <p>A method for forming a crystal comprises applying a crystal forming treatment on a substrate having a free surface comprising a nonnucleation surface (SNDS) with small nucleation density and a nucleation surface (SNDL) exposed from said nonnucleation surface having a sufficiently small area for a crystal growing only from a single nucleus and having a greater nucleation density (NDL) than the nucleation density (NDS) of said nonnucleation surface (SNDS), thereby growing a single crystal from said single nucleus.</p>
申请公布号 EP0240309(B1) 申请公布日期 1996.08.28
申请号 EP19870302788 申请日期 1987.03.31
申请人 CANON KABUSHIKI KAISHA 发明人 MATSUYAMA, JINSHO;HIRAI, YUTAKA;UEKI, MASAO;SAKAI, AKIRA
分类号 C23C16/04;C23C16/24;C23C16/44;C30B25/18;H01L21/20;H01L21/205;(IPC1-7):H01L21/20;C30B25/04;C30B23/04 主分类号 C23C16/04
代理机构 代理人
主权项
地址