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发明名称
VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH03169008(A)
申请公布日期
1991.07.22
申请号
JP19890308762
申请日期
1989.11.28
申请人
FUJITSU LTD
发明人
UESUGI HIROYUKI;HIGASHIMOTO MASAYUKI
分类号
H01L21/205;C23C16/44;C23C16/455;C30B25/14;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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