发明名称 |
MOUNTING FOR A PROBE TIP IN A SCANNING FORCE OR SCANNING TUNNELING MICROSCOPE |
摘要 |
<p>In a support arrangement for a probe tip of a scanning force microscope or a SNOM wherein the movement of the probe tip while scanning a sample surface is interferometrically determined and wherein a ferrule mounted on a ferrule holder includes an optical light conductor with an end projecting from the ferrule and having an end face, the probe tip is supported by a mounting means which can be slipped onto the ferrule into a predetermined position in which the probe tip is disposed in front of the light conductor end face with a given gap therebetween.</p> |
申请公布号 |
EP0728294(A1) |
申请公布日期 |
1996.08.28 |
申请号 |
EP19950900620 |
申请日期 |
1994.11.09 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH |
发明人 |
SAURENBACH, FRANK;FUSS, HANS-ACHIM |
分类号 |
G01B21/30;G01B7/34;G01N27/00;G01N37/00;G01Q20/02;G01Q70/02;G02B6/00;H01J37/28;(IPC1-7):G01B7/34 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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