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摘要
申请公布号
JP2528253(B2)
申请公布日期
1996.08.28
申请号
JP19930127404
申请日期
1993.05.28
申请人
发明人
分类号
H01L21/331;H01L29/15;H01L29/205;H01L29/73;H01L29/737;(IPC1-7):H01L21/331
主分类号
H01L21/331
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