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经营范围
发明名称
WAFER HEATING APPARATUS
摘要
申请公布号
KR960007294(Y1)
申请公布日期
1996.08.28
申请号
KR19900020495U
申请日期
1990.12.21
申请人
LG SEMICONDUCTOR CO., LTD.
发明人
BYUN, SUK - HO
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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