发明名称 VIBRATION CONTROL DRIVING DEVICE OF RECTILINEARLY RECIPROCATING MEMBER
摘要 PURPOSE: To reliably position and stop a member with high accuracy by preventing the generation of its vibration even when a rectilinearly reciprocating member is driven in the horizontal direction. CONSTITUTION: A cross bar as a rectilinearly reciprocating member can slidingly freely move in the horizontal direction by a guide rail. An interlocking shaft is rotatably arranged on the cross bar, and pinion gears 11 and 12 meshing with a rack gear arranged along the guide rail are arranged on both ends of this interlocking shaft. The interlocking shaft is composed of two shaft members 10a and 10b, and these shaft members 10a and 10b are connected to each other through a rubber elastic cylindrical member 34 as a damping connecting part. Therefore, generation of vibration of the driven side shaft member 10b when rotation of the interlocking shaft 10 is stopped, can be prevented.
申请公布号 JPH08216067(A) 申请公布日期 1996.08.27
申请号 JP19950032742 申请日期 1995.02.21
申请人 TECHNO KAPURA:KK 发明人 OKAZAKI TADAO
分类号 B23Q7/04;B25J5/02;B25J9/02;F16H25/20;H01L21/677;H01L21/68;H05K13/00 主分类号 B23Q7/04
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