Manufacturing method of magnetic recording medium

摘要

In a manufacturing method of a magnetic recording medium with a vacuum deposition, two shielding members are provided above a substrate for defining an aperture. An evaporation source is located at a position wherein evaporated atoms from an evaporation material can adhere to a moving substrate through the aperture. The substrate is moved while a material in the evaporation source is irradiated at two evaporation portions with two electron beams along a moving direction of the substrate to form a magnetic layer. Thus, curving of columnar gains formed in the magnetic layer is suppressed or crystal orientation is enhanced, and magnetic read/write characteristics are improved. Further, a productivity is improved because the aperture can be enlarged than previously by using the two evaporation portions.