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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH08218167(A)
申请公布日期
1996.08.27
申请号
JP19950020284
申请日期
1995.02.08
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
SERIKAWA TADASHI
分类号
C23C14/34;C23C14/42;H01L21/203;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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