| 摘要 |
PURPOSE: To accurately detect the flatness of a polishing territory on the surface of a surface plate for polishing based on data measured continuously and quantatively. CONSTITUTION: This flatness detecting device is provided with a displacement measuring device 11 which can be installed on a polishing surface plate 1 having groove parts 4 in the polishing territory 2 of the surface, and can measure displacement extending over the polishing territory and the outside polishing territory part of the surface plate continuously and quantatively so as to traverse the surface plate. Further it is provided with a data processing device 12 which takes many measured data from the displacement measuring device, replaces the measured data of the groove parts within many measured data by measuring between the end parts 5 of the polishing territory of the surface plate by the value of measured data by measuring the surface plate polishing territory in order of directly before them, so as to remove the measured data by measuring the groove parts, computes difference between the maximum value and the minimum value from the measurement data group in which the measured data of the groove parts are removed, and hence computes flatness of the polishing territory of the surface of the surface plate. |
