Measuring system for position measurement in nanometer and subnanometer range

摘要

One of the two component parts can also work as a part of a X-ray radiation detection system. This part is so tuned to the characteristic parameters of the stationary X-ray wave field. That interactions with the energy density distribution of this stationary X-ray wave field can be determined in the space, or its influencing by the other part relative to its position as a detection signal. Data from this can be derived regarding the position of these component parts one to the other, based on their positions relative to the stationary X-ray wave field. The two parts are parts of a deformable crystal or layer system, with flat boundary surfaces, movable to contact each other or against each other. The resulting stationary X-ray field inside the system of the two component parts is essential for the interaction and position measurement.