Biaxial inclination sensor

摘要

This invention aims to eliminate causes of errors and provide a biaxial inclination sensor having high resolution and reproducibility and stability of detection with which it is possible to secure a high levelness of inclination angle zero by attitude control. In the inner bottom of a circular liquid chamber 11 formed in a sensor holder l made of an insulating material and having a bottom surface 28 made horizontal are mounted one common electrode 2 made of 18K (Au) having a low ionization tendency in a central position and vertical with respect to the bottom surface 28 and four outer electrodes 3 made of the same material as the common electrode 2 and passing vertically through the bottom surface 28 at points of intersection of two horizontal orthogonal lines passing through the center and a circle of a predetermined radius about the center and all having the same surface area. An opening in the liquid chamber 11 of the sensor holder 1 is liquidproofly closed off by a glass window plate 4 having a spherical concave portion 9 of a surface roughness less than JIS Rmax 0.2S in its inner surface and a gas bubble 8 and an electrolyte 7 made by mixing pure water as a solvent, magnesium sulfate as a solute and anhydrous methanol as a solution in such ratios that the impedance between the electrodes is 10K OMEGA are sealed into the sealed liquid chamber 11 in amounts such that the common electrode 2 is always submerged in the electrolyte and does not make contact with the gas bubble 8.