发明名称 |
WIRE WIDTH CHANGE MEASUREMENT METHOD OF DEFECTIVE PATTERN |
摘要 |
The method uses a mask having a defect(7) and a connecting line(6) between double-faced pads(5). The method includes the steps of: forming a plurality of resistance measuring patterns in a finite size; measuring a resistance between the pads(5) and a width of the defect pattern after the mask transcription on a conducting layer.
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申请公布号 |
KR960011252(B1) |
申请公布日期 |
1996.08.21 |
申请号 |
KR19920027071 |
申请日期 |
1992.12.31 |
申请人 |
HYUNDAI ELECTRONICS IND. CO., LTD. |
发明人 |
HU, IK - BUM;KIM, YOUNG - SIK |
分类号 |
H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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