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发明名称
MICROMACHINED MASS SPECTROMETER
摘要
申请公布号
EP0727095(A1)
申请公布日期
1996.08.21
申请号
EP19940930432
申请日期
1994.09.14
申请人
ROSEMOUNT ANALYTICAL INC.
发明人
SITTLER, FRED, C.
分类号
H01J27/26;H01J49/16;H01J49/28;(IPC1-7):H01J49/16
主分类号
H01J27/26
代理机构
代理人
主权项
地址
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