Optical beam homogenizing apparatus and method

摘要

An optical beam homogenizer includes an entrance pupil through which a non-uniform optical beam propagates. A first optical component having plural flat surfaces receives the input beam. The flat surfaces of the first optical component effectively segment the entrance pupil by dividing the input beam into plural beamlets, one beamlet for each pupil segment and flat surface. The beamlets are received by a second optical component which also has multiple flat surfaces, each flat surface receiving a beamlet. The second optical component directs the beamlets toward each other such that they overlap at an exit pupil of the system. The second optical component also focuses the beamlets such that an image of each entrance pupil segment is formed at the exit pupil. The images of the individual entrance pupil segments are superimposed upon each other at the exit pupil to form a uniform optical output beam.