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发明名称
PARTICLE BEAM DEVICE
摘要
申请公布号
JPH08212956(A)
申请公布日期
1996.08.20
申请号
JP19950015694
申请日期
1995.02.02
申请人
HITACHI LTD
发明人
WAKE IZUMI;BABA TAKASHI
分类号
H01J37/147;H01L21/265;(IPC1-7):H01J37/147
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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