| 摘要 |
<p>PURPOSE: To improve the S/N of a fluidic fluid control device against low-frequency noise at high-flow-rate time by specifying the dimensional relation between each section of the device. CONSTITUTION: The shape of each section of a fluidic fluid control device 43 is specified so that the dimensional relation between each section can satisfy the inequalities. In the inequalities, D, WN, RF, and WE respectively represent the depth of a flow passage 16, width of a nozzle 13, radii of curvature of two corner sections 46 on both sides of the nozzle 13 in the expanded section 14 of the flow passage 16, and width of the expanded section 14. In addition, LY, YE, RW, and WB respectively represent the interval between the nozzle 13 and a vibration inducer 44, interval between the inducer 44 and an end block 18, radii of curvature of the concave surfaces of both curved wing sections 20 of the block 18, and distance between internal surfaces of both wing sections 20. Moreover, S, RB, and LE respectively represent the interval between both wing sections 20 and the expanded section 14, the radii of curvature of two corner sections 47 on both sides of the exhaust port of the expanded section 14, and the distance between the block 18 and port 15. Since the shape of the device 43 is optimized in such a way, the flow rate measuring S/N becomes excellent over almost all measuring region.</p> |
