| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an apparatus of simple structure whose energy loss due to friction of a driving part is little, by installing an X-Y table constituted of a linear stepping motor, an elevating means for elevating a capillary, and a position detecting means for detecting the movement amount in the X, Y direction. SOLUTION: In this apparatus the following are installed. A frame 1; an X-Y table 10 constituted of a linear stepping motor; a transducer 23 which is arranged on the upper surface of the table to be capable of pivoting, and provided with a capillary 24 on the first end portion; a first elevating means 30 which is installed in the vicinity of the second end portion of the transducer 43, in order to elevate the capillary 24; a second elevating means 40 which is arranged on the X-Y table 10 provided separately from the first elevating means 30 toward the first end portion of the transducer 23, and elevates the capillary 24 at the time of bonding; and first position detecting means 100 which are instaled on the frame 1 and the X-Y table 10 and detect the movement amount in the X, Y direction.</p> |
