| 摘要 |
<p>PURPOSE: To provide a manufacturing method for an electric field emission type element of high performance having an emitter tip with small curvature and vertical angle. CONSTITUTION: A recessed part 11 having vertical side walls is formed in the surface of a substrate 10 and a first sacrifice film 12 is deposited on the substrate 10. The first sacrifice film 12 is etched to form side spacers 13 in the side walls of the recessed part 11 and after that, a second sacrifice film 14 is deposited on the surface in the state in which the sharp recessed part 15 is reflected. An emitter electrode film 16 is deposited on the second sacrifice film 14 to form a fine cathode with a sharp tip part and the fine cathode is exposed by removing an unnecessary material under the cathode by etching.</p> |
