COOLING DEVICE OF REFLECTION MIRROR FOR HIGH POWER LASER

摘要

PURPOSE: To prevent the deformation of the reflection mirror of a high power laser caused by the pressure of coolant. CONSTITUTION: When coolant R flows into a coolant groove 5, the pressure of the coolant R is directly applied to a back plane 1b of a metallic mirror 1. Since the rigidity of a cover material 15 is smaller than the rigidity of the mirror 1, the material 15 is deflected to a space 23 side by the pressure of the coolant R, the deformation of the mirror 1 is prevented and as a result, a high surface precision of the mirror 1 is maintained.