| 摘要 |
PURPOSE: To obtain a resist compsn. excellent in performance such as gamma value. CONSTITUTION: This resist compsn. contains alkali-soluble polyphenol represented by formula I, an alkali-soluble polyhydroxy compd. represented by formula II, alkali-soluble novolak resin and a 1,2-quinonediazido compd. In the formula I, each of R and1 -R6 is H, 1-6C alkyl, etc., R7 is 1-6C alkyl, etc., and each of (m) and (n) is an integer of 1-3. In the formula II, R8 is H, etc., each of R9 -R11 is 1-6C alkyl, etc., each of (a)-(f) is an integer of 0-3 and at least two among (b), (d) and (f) are integers of 1-3. |
