| 摘要 |
PURPOSE: To provide a wafer processing equipment which can hold wafers in a slant position with simple-structure and without employing a complex mechanical control mechanism. CONSTITUTION: This system is provided with a wafer processing chamber 3 which has a wafer holding section 7 and a wafer mounting section 9. The wafer holder section 7 can move up and down, holding a wafer 6 carried in by a carrier arm 5 through a gate 4 horizontally from the rear face. The wafer mounting section 9 is installed below the wafer holding section 7 and has a slant face 8. The wafer mounting section 9 gets the wafer 6 off from the wafer holding section 7 when the wafer 6 is lowered by the wafer holding section 7 and puts it on its slant face 8. |
