发明名称 PHOTOMASK
摘要 PURPOSE: To efficiently inspect the breakage of the pattern of a patterned electrode by providing a wiring pattern for inspecting the breakage having the same width as the electrode pitch in a first part outside a wiring pattern corresponding to the electrode pattern. CONSTITUTION: A segment electrode is formed at the central part of an electrode pattern having a large electrode pitch, and the peripheral part of the electrode pattern having a small electrode pitch is connected to a segment driver to impress a driving voltage based on display data. An electrode wiring pattern 37 for inspecting breakage is provided in succession to the terminal part of the segment electrode, and the electrode pitch of the pattern 37 is equalized with the electrode pitch at the central part of the electrode pattern constituting the segment electrode. a needle or a conductor brush 34 is abutted on the one end of the electrode pattern 37, the needle or the conductor brush 34 is abutted on the electrode pattern 37 and moved in parallel, and the breakage of the electrode pattern is inspected.
申请公布号 JPH08211589(A) 申请公布日期 1996.08.20
申请号 JP19950017890 申请日期 1995.02.06
申请人 HITACHI LTD;HITACHI DEVICE ENG CO LTD 发明人 ISHII KOJI;NEMOTO SOTA
分类号 G02F1/1343;G03F1/00 主分类号 G02F1/1343
代理机构 代理人
主权项
地址