SCANNING SOUND MICROSCOPE, ITS SENSITIVE UNIT AND METHOD FOR ADJUSTMENT OF CANTILEVER

摘要

FIELD: optical instruments. SUBSTANCE: device has holding unit, on which simultaneously cantilever and needle are mounted. Inter-nuclear forces between cantilever needle and surface during scanning cause deviation of cantilever which is transmitted to photo diode matrix by means of laser beam reflected from cantilever. Another characteristic which is changed during scanning is tunnel current between needle of cantilever and surface. detecting electric circuits of channels of asynchronous and synchronous modes are connected to feedback circuit by means of relay which switches operating modes by command from operator. Combined sound which is located instead holding unit together with cantilever and needle provides possibility to investigate same part of surface in both modes. Improved method for adjustment of cantilever involves keeping drive away from stage with cantilever. EFFECT: increased functional capabilities, decreased drift. 4 cl