| 摘要 |
PURPOSE: To measure the distance resolution of a high frequency ultrasonic inspection device. CONSTITUTION: After a resist 2 is applied to the whole upper surface of a plate 1, a defective pattern is formed thereon, and a groove 4 is formed by etching treatment. A material 5 differed in acoustic impedance from the plate 1 is laminated on the groove 4 to form an artificial defect 3, and the surface of the plate 1 is smoothed, whereby a reference sample is manufactured. According to the above process, a shallow artificial defect can be easily formed, and a reference sample usable for the evaluation of distance resolution of a high frequency ultrasonic probe in which even a shallow artificial defect can be easily formed can be manufactured. The artificial defect 3 can be easily formed in the inner part of the reference sample, and further, a plurality of artificial detects 3 having different depths can be also easily formed. |
