| 摘要 |
PURPOSE: To provide a vacuum clamping apparatus such that the accuracy of controlling the pressing faces of rods and the efficiency of electric parts mounting are improved. CONSTITUTION: A vacuum clamping apparatus D1 for chip mounter is provided with plural rods 1, plural static pressure bearings 2 and a head section 3. The rods 1 have sucking ports 10, exhausting ports 13 and first evacuation ports 14 as gas passages. The sucking ports 10 are formed at the ends of the rods 1 and held chip capacitors 6 to be held by vacuum suction. The exhausting ports 13 are formed around external surface of the rods 1. The first vacuum suction passages 14 connect the sucking ports 10 with the exhausting ports 13. The static pressure bearings 2 bear each rod 1 movably and contactlessly by means of pressure fluid. The static pressure bearings 2 are fixed on the lower surface of the head portion 3. |
