| 摘要 |
PROBLEM TO BE SOLVED: To prevent the few quanta of X ray penetrating to a photodiode directly from forming disturbing signals by building in a suction diode between a couple of photodiodes and having the suction diode operate in the reverse direction. SOLUTION: A photodiode 3 is formed on a substrate 1 provided with a backside contact 2. One suction diode 4 is arranged between each couple of photodiodes 3 and the suction diode is formed on the substrate 1 similarly. The anodes 5 of the suction diodes 4 are interconnected and the common anode contact 5 is connected to a voltage source 6. Therefore, the suction diodes 4 are operated in the reverse direction. Selecting adequately the suction voltage and the bias voltage of the photodiodes 3 that is the voltage of a voltage source 7, the space-charge region of the suction diode can be adjusted smoothly.
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