| 摘要 |
PURPOSE: To provide the method and device for controlling temperature with which temperature control to a slow heat transmission phenomenon can be performed at high speed. CONSTITUTION: A controlled object 11 is controlled to be heated or cooled by a heat exchanger 12 so that the temperature of this controlled object can be set at a target temperature. A control model part 15 is composed of a heat transfer model 15-2 described with the move of heat from the heat exchanger to the controlled object and a heat conduction model 15-1 described with the temperature change inside the controlled object. While using the heat conduction model 15-1 and the heat transfer model 15-2 constituting the control model part, a temperature controller 14 controls the temperature of the controlled object 11 by applying a command value to the heat exchanger so that the temperature of the controlled object can be matched with a target temperature Tref given in advance from a heat transfer rate h* in the case of heat transfer from the heat exchanger to the controlled object based on temperatures at two points in the thicknesswise direction of the controlled object detected by a heat transfer rate detector. |
