Humidity sensor and method for making

摘要

A humidity sensor includes a pair of opposed electrodes disposed on an insulating substrate and defining a gap therebetween and a humidity sensitive thin film covering the gap. This thin film is formed by coating a polymer of specific structure having an ethylenically unsaturated reactive group and exposing the coating to ultraviolet radiation for crosslinking. The sensor is fully water resistant and produces accurate outputs over a wide humidity range and thus can detect and determine moisture in the surrounding atmosphere.