CHARGED PARTICLE BEAM APPLYING DEVICE,申请号JP19950304088-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM APPLYING DEVICE
摘要
申请公布号	JPH08212955(A)	申请公布日期	1996.08.20
申请号	JP19950304088	申请日期	1995.11.22
申请人	HITACHI LTD	发明人	KURODA KATSUHIRO
分类号	H01J37/05;H01J37/147;(IPC1-7):H01J37/147	主分类号	H01J37/05
代理机构		代理人
主权项
地址

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