RADIATION-CURING COMPOSITION, ITS CURING METHOD AND PATTERN FORMING METHOD

摘要

PURPOSE: To produce a radiation-curing compsn. causing a very slight decrease of its weight by curing, capable of curing with low intensity radiation and giving a heat resistant cured body and to provide a pattern forming method utilizing the compsn. CONSTITUTION: This radiation-curing compsn. contains a base generating material which generates a base by the action of radiation and polymer molecules each having an Si-H bond which reacts with an OH group by the action of the base and can form an Si-O bond and2 . When this compsn. is cured by irradiation, a mask is put between a coating film of this compsn. and a radiation source and the uncured part is dissolved and removed to form a pattern.